Ion Beam Etching and Deposition Device 'QuaZar(TM)'
Achieving high throughput! Large-area ion source and advanced motion control.
We would like to introduce our ion beam etching and deposition system, 'QuaZar(TM)'. With a large-area ion source and advanced motion control, it achieves high throughput. In particular, the Marathon(TM) grid allows for excellent uniformity over a long period compared to conventional methods. 【Specifications】 ■ Ion beam system ■ Process temperature: -40℃ to +60℃ ■ Tilt angle: +90 degrees to -80 degrees ■ Load lock or CtoC ■ Wafer sizes: 100mm, 150mm, 200mm * You can download the English version of the catalog. * For more details, please refer to the PDF document or feel free to contact us.
- Company：プラズマ・サーモ・ジャパン
- Price：Other
